Plasma Cell is an effective component for conversion of highly stable source gases such as N₂, O₂, Ar and H₂ to more active atomic and molecular species suitable for MBE growth
- RF Atom source (inductively coupled 13.56MHz)
- Easy to install on all vacuum systems
- Easy to operate and tune plasma flux
- High cracking efficiency
- Variable distance plasma cell to substrate with quartz tube
A. Feature of Plasma cell
- System : Available for use with MBE systems
- Source gas : N₂, O₂, Ar, H₂
- Mounting flange size : CF4.5"
- RF power : 150W, 13.56MHz
- Cooling method : Water
